VICTORY Simulation Sample
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プレゼンテーション資料

VICTORY Cell and its Competitors
Synopsys Sentaurus Process, T-SUPREMIV (SUPREM4), Coventor SEMulator3D (SEM)
VICTORY Cell is a fast, layout driven 3D process simulator specifically designed for large scale structures and is a suitable replacement for Synopsys Sentaurus Process, T-SUPREMIV (SUPREM4) and Coventor SEMulator3D (SEM).
High simulation speed is derived from careful optimization of each process model, thus, enabling fast simulation of long, multiple-step process flows. VICTORY Cell is integrated with interactive tools (including TonyPlot, DeckBuild, DevEdit and MaskViews) and Virtual Wafer Fab (VWF).
Key features:
- Provides fast and accurate simulation of semiconductor technologies such as:
- Power devices: BJT, JFET, IGBT, etc.
- Buffered super junction devices: LDMOS, diodes, etc.
- Optoelectronic and CMOS image sensor devices
- Large TFT display cells, MEMS, etc.
- Supports GDSII mask layout format
- Accurate and fully multi-threaded 3D Monte Carlo implantation
- Physically based models of ion implantation in crystalline silicon
- Damage accumulation and amorphization, pre-amorphization implants
- (PAI) for shallow junctions
- Parallel Monte-Carlo algorithm with nearly linear scalability
- Shadowing and re-implantation, Well proximity effects (WPE)
- Fast and scalable diffusion model with thermal budget simulation capabilities, high/low concentration co-diffusion effects and segregation, capable of simulating diffusion in a multi million node structures.
- Mesh algorithms optimized for large device structures, capable of fast pattern transfer, high-aspect ratio etches, and thin layer conformal depositions.
- Automated layout-driven mesh generation with additional user-controlled mesh placement
- Easy to learn and user-friendly SUPREM-like syntax
- Interface to VICTORY Stress and 3D Device simulators ATLAS 3D, VICTORY Device
- Accurately solves critical 3D process steps (e.g. doping, thin layer deposition) over multiple devices in a structure, capable of handling much larger layouts/cells than Santaurus(tm) from Synopsys.
- Resolves integration issues due to layout design errors, and is a more accurate tool for complex device cell process prototyping compared to SEMulator3D(tm) from Coventor
Synopsys Sentaurus Process, T-SUPREMIV (SUPREM4) and Coventor SEMulator3D (SEM) are the trademarks of their respective owners.